High-Resolution Lithographic Patterning with Organotin Films: Role of CO2 in Differential Dissolution Rates

Hydrolysis and Condensation of n-BuSnCl3: Enabling Deposition of Smooth Metal Oxide Photoresist Thin Films

(2020) Nizan Kenane et al.   INORGANIC CHEMISTRY

Effect of Oxygen on Thermal and Radiation-Induced Chemistries in a Model Organotin Photoresist

(2019) Ryan T. Frederick et al.   ACS Applied Materials & Interfaces

Organotin Carboxylate Reagents for Nanopatterning: Chemical Transformations during Direct-Write Electron Beam Processes

(2019) Meredith C. Sharps et al.   CHEMISTRY OF MATERIALS

On the Mechanism of Carbon Dioxide Reduction on Sn-Based Electrodes: Insights into the Role of Oxide Surfaces

(2019) Giane B. Damas et al.   Catalysts

Mechanistic Study of HafSOx Extreme Ultraviolet Inorganic Resists

(2018) Ryan T. Frederick et al.   Journal of Physical Chemistry C

Photo-induced Fragmentation of a Tin-oxo Cage Compound

(2018) Jarich Haitjema et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Dual-tone Application of a Tin-Oxo Cage Photoresist Under E-beam and EUV Exposure

(2018) Yu Zhang et al.   JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

Ambient-Pressure X-ray Photoelectron Spectroscopy Characterization of Radiation-Induced Chemistries of Organotin Clusters

(2018) J. Trey Diulus et al.   ACS Applied Materials & Interfaces

Thermal and radiation chemistry of butyltin oxo hydroxo: A model inorganic photoresist

(2018) Ryan T. Frederick et al.   MICROELECTRONIC ENGINEERING

Extreme ultraviolet patterning of tin-oxo cages

(2017) Jarich Haitjema et al.   Journal of Micro-Nanolithography MEMS and MOEMS

Photochemical conversion of tin-oxo cage compounds studied using hard x-ray photoelectron spectroscopy

(2017) Yu Zhang et al.   Journal of Micro-Nanolithography MEMS and MOEMS

CO 2 -sensing properties and mechanism of nano-SnO 2 thick-film sensor

(2016) Dandan Wang et al.   SENSORS AND ACTUATORS B-CHEMICAL

Fabrication of high-aspect ratio silicon nanopillars for tribological experiments

(2015) Pavlo V. Antonov et al.   Journal of Micro-Nanolithography MEMS and MOEMS

Chemical and Structural Investigation of High-Resolution Patterning with HafSOx

(2014) Richard P. Oleksak et al.   ACS Applied Materials & Interfaces

Sites for Methane Activation on Lithium-Doped Magnesium Oxide Surfaces

(2014) Karolina Kwapien et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

Improving the adhesion of hydrogen silsesquioxane (HSQ) onto various substrates for electron-beam lithography by surface chemical modification

(2014) Zhiqiang Zhang et al.   MICROELECTRONIC ENGINEERING

Photolithographic properties of tin-oxo clusters using extreme ultraviolet light (13.5nm)

(2014) Brian Cardineau et al.   MICROELECTRONIC ENGINEERING

High resolution HSQ nanopillar arrays with low energy electron beam lithography

(2013) Y. Guerfi et al.   MICROELECTRONIC ENGINEERING

Materials challenges for sub-20-nm lithography

(2011) James W. Thackeray   Journal of Micro-Nanolithography MEMS and MOEMS

Di-n-butyltin oxide as a chemical carbon dioxide capturer

(2010) Laurent Plasseraud et al.   JOURNAL OF ORGANOMETALLIC CHEMISTRY

Observing hydrogen silsesquioxane cross-linking with broadband CARS

(2009) Allison G. Caster et al.   JOURNAL OF RAMAN SPECTROSCOPY

Activation of Methane by Oligomeric (Al2O3)x+ (x=3,4,5): The Role of Oxygen-Centered Radicals in Thermal Hydrogen-Atom Abstraction

(2008) Sandra Feyel et al.   ANGEWANDTE CHEMIE-INTERNATIONAL EDITION

High resolution, high sensitivity inorganic resists

(2008) Jason Stowers et al.   MICROELECTRONIC ENGINEERING