Mechanistic Study of HafSOx Extreme Ultraviolet Inorganic Resists

Published 2018 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Mechanistic Study of HafSOx Extreme Ultraviolet Inorganic Resists
Authors
Keywords
-
Journal
Journal of Physical Chemistry C
Volume 122, Issue 28, Pages 16100-16112
Publisher
American Chemical Society (ACS)
Online
2018-06-21
DOI
10.1021/acs.jpcc.8b03771

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Create your own webinar

Interested in hosting your own webinar? Check the schedule and propose your idea to the Peeref Content Team.

Create Now
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.