Fabrication of piezoresistive Si nanorod-based pressure sensor arrays: A promising candidate for portable breath monitoring devices
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Title
Fabrication of piezoresistive Si nanorod-based pressure sensor arrays: A promising candidate for portable breath monitoring devices
Authors
Keywords
Si Nanorod, Piezoresistivity, Pressure sensor, Breath detection
Journal
Nano Energy
Volume 80, Issue -, Pages 105537
Publisher
Elsevier BV
Online
2020-10-28
DOI
10.1016/j.nanoen.2020.105537
References
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