Self-Align-Gated GaN Field Emitter Arrays Sharpened by a Digital Etching Process

Published 2021 View Full Article

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Title
Self-Align-Gated GaN Field Emitter Arrays Sharpened by a Digital Etching Process
Authors
Keywords
-
Journal
IEEE ELECTRON DEVICE LETTERS
Volume 42, Issue 3, Pages 422-425
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2021-02-25
DOI
10.1109/led.2021.3052715

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