期刊
IEEE ELECTRON DEVICE LETTERS
卷 42, 期 3, 页码 422-425出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2021.3052715
关键词
Gallium nitride; Logic gates; Germanium; Silicon; Anodes; Etching; Iron; Digital etching; field emitter arrays; GaN
资金
- Air Force Office of Scientific Research (AFOSR) through the Multidisciplinary Research Program of the University Research Initiative (MURI) [FA9550-18-1-0436]
Field emitters have attracted much attention for high-frequency and harsh-environment applications, with III-Nitrides showing promise due to their tunable electron affinities. The main challenges for low turn-on-voltage III-Nitrides field emitters are the lack of a self-aligned gate and tip-sharpening technologies. This study demonstrates self-aligned-gated GaN field emitter arrays with sharpened tips using wet-based digital etching technology.
Field emitters are attracting much attention recently because of their potential for high-frequency and harsh-environment applications. Although silicon is the most studied semiconductor for field emitters, III-Nitrides are also very promising thanks to their tunable electron affinities. Two main challenges exist for low turn-on-voltage III-Nitrides field emitters: lack of a self-aligned gate and tip-sharpening technologies. In this work, we demonstrate self-aligned-gated GaN field emitter arrays whose tips are sharpened by a wet-based digital etching technology. This technology allows to reduce the tip size from 40 nm down to 20 nm. Gated GaN field emitters with a turn-on voltage (V-GE,V-ON) of 20 V and current density of 150 mA/cm(2) at V-GE = 50 V have been demonstrated.
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