Insertion of Dielectric Interlayer: A New Approach to Enhance Energy Storage in HfₓZr1-xO₂ Capacitors

Title
Insertion of Dielectric Interlayer: A New Approach to Enhance Energy Storage in HfₓZr1-xO₂ Capacitors
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 42, Issue 3, Pages 331-334
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2021-01-28
DOI
10.1109/led.2021.3055140

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