Insertion of Dielectric Interlayer: A New Approach to Enhance Energy Storage in HfₓZr1-xO₂ Capacitors

标题
Insertion of Dielectric Interlayer: A New Approach to Enhance Energy Storage in HfₓZr1-xO₂ Capacitors
作者
关键词
-
出版物
IEEE ELECTRON DEVICE LETTERS
Volume 42, Issue 3, Pages 331-334
出版商
Institute of Electrical and Electronics Engineers (IEEE)
发表日期
2021-01-28
DOI
10.1109/led.2021.3055140

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