Fabrication of Ta-Si-C targets and their utilization for deposition of low friction wear resistant nanocomposite Si-Ta-C-(N) coatings intended for wide temperature range tribological applications

Title
Fabrication of Ta-Si-C targets and their utilization for deposition of low friction wear resistant nanocomposite Si-Ta-C-(N) coatings intended for wide temperature range tribological applications
Authors
Keywords
Composite powders, Multicomponent targets, Magnetron sputtering, Coating structure, High-temperature tribology
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 359, Issue -, Pages 342-353
Publisher
Elsevier BV
Online
2018-12-08
DOI
10.1016/j.surfcoat.2018.12.030

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