Fabrication of micro-pillar with high aspect ratio on monocrystalline diamond by galvanometer-assisted femtosecond laser milling
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Title
Fabrication of micro-pillar with high aspect ratio on monocrystalline diamond by galvanometer-assisted femtosecond laser milling
Authors
Keywords
Micro-pillar, Aspect ratio, Monocrystalline diamond, Galvanometer, Femtosecond laser
Journal
Journal of Manufacturing Processes
Volume 60, Issue -, Pages 247-256
Publisher
Elsevier BV
Online
2020-10-29
DOI
10.1016/j.jmapro.2020.10.055
References
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