Journal
DIAMOND AND RELATED MATERIALS
Volume 34, Issue -, Pages 19-24Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.diamond.2013.01.009
Keywords
Reactive ion etching; Synthetic diamond; Interface structure
Categories
Funding
- Swedish Diamond Center
- Uppsala University
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In this paper we describe a process for fabricating high aspect ratio gratings in single- or polycrystalline diamond with the high precision required by micro-optics. Nanoimprint lithography with a soft stamp and several layers of hard masks allowed for rapid and accurate replication of patterns written by e-beam or laser into thick Al masks on diamond substrates as large as 2 cm in diameter. Vertical sidewalls in the mask were crucial for avoiding microvilli formation during diamond plasma etching and were achieved by etching and oxidizing the Al mask in cycles. Circularly symmetric half-wave plates for wavelength bands around 4 and 11 mu m were fabricated with deep circular gratings on one side and antireflective gratings on the other. (C) 2013 Elsevier B.V. All rights reserved.
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