Synthesis and characterization of hexamethyldisilane films deposited on stainless steel by plasma-enhanced chemical vapour deposition

Title
Synthesis and characterization of hexamethyldisilane films deposited on stainless steel by plasma-enhanced chemical vapour deposition
Authors
Keywords
Carbon films, PECVD, Hexamethyldisilane, Raman, Hardness, Friction coefficient
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 404, Issue -, Pages 126443
Publisher
Elsevier BV
Online
2020-09-22
DOI
10.1016/j.surfcoat.2020.126443

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