Characterization of diamond-like nanocomposite thin films grown by plasma enhanced chemical vapor deposition

Title
Characterization of diamond-like nanocomposite thin films grown by plasma enhanced chemical vapor deposition
Authors
Keywords
-
Journal
JOURNAL OF APPLIED PHYSICS
Volume 107, Issue 12, Pages 124320
Publisher
AIP Publishing
Online
2010-06-26
DOI
10.1063/1.3415548

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