Comparison of passivation properties of plasma-assisted ALD and APCVD deposited Al2O3 with SiNx capping

Fully screen-printed bifacial large area 22.6% N-type Si solar cell with lightly doped ion-implanted boron emitter and tunnel oxide passivated rear contact

(2020) Ying-Yuan Huang et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

High efficiency screen-printed n-type silicon solar cell using co-diffusion of APCVD boron emitter and POCl 3 back surface field

(2018) Kyungsun Ryu et al.   CURRENT APPLIED PHYSICS

Fabrication and Modeling of High-Efficiency Front Junction N-Type Silicon Solar Cells With Tunnel Oxide Passivating Back Contact

(2017) Ajeet Rohatgi et al.   IEEE Journal of Photovoltaics

Properties of the c-Si/Al2O3 interface of ultrathin atomic layer deposited Al2O3 layers capped by SiNx for c-Si surface passivation

(2014) D. Schuldis et al.   APPLIED PHYSICS LETTERS

Effect of boron concentration on recombination at the p-Si–Al2O3 interface

(2014) Lachlan E. Black et al.   JOURNAL OF APPLIED PHYSICS

Excellentc-Si surface passivation by thermal atomic layer deposited aluminum oxide after industrial firing activation

(2013) B Liao et al.   JOURNAL OF PHYSICS D-APPLIED PHYSICS

Evaluation of implantation annealing for highly-doped selective boron emitters suitable for screen-printed contacts

(2013) Ralph Müller et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Thermal stability of silicon surface passivation by APCVD Al2O3

(2013) Lachlan E. Black et al.   SOLAR ENERGY MATERIALS AND SOLAR CELLS

Surface passivation of c-Si by atmospheric pressure chemical vapor deposition of Al2O3

(2012) Lachlan E. Black et al.   APPLIED PHYSICS LETTERS

Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface

(2012) G. Dingemans et al.   JOURNAL OF APPLIED PHYSICS

Thermal stability of the Al2O3passivation on p-type silicon surfaces for solar cell applications

(2009) Jan Benick et al.   Physica Status Solidi-Rapid Research Letters

Silicon surface passivation by ultrathin Al2O3films synthesized by thermal and plasma atomic layer deposition

(2009) G. Dingemans et al.   Physica Status Solidi-Rapid Research Letters

High efficiency n-type Si solar cells on Al2O3-passivated boron emitters

(2008) Jan Benick et al.   APPLIED PHYSICS LETTERS

Silicon surface passivation by atomic layer deposited Al2O3

(2008) B. Hoex et al.   JOURNAL OF APPLIED PHYSICS