Soft and flexible gold microelectrodes by supersonic cluster beam deposition and femtosecond laser processing
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Title
Soft and flexible gold microelectrodes by supersonic cluster beam deposition and femtosecond laser processing
Authors
Keywords
Microelectrodes, Micropatterning, Flexible electronics, Supersonic cluster beam deposition, Femtosecond lasers, Nanocomposite films
Journal
MICROELECTRONIC ENGINEERING
Volume 237, Issue -, Pages 111478
Publisher
Elsevier BV
Online
2020-11-12
DOI
10.1016/j.mee.2020.111478
References
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