Stretchable gold conductors embedded in PDMS and patterned by photolithography: fabrication and electromechanical characterization

Title
Stretchable gold conductors embedded in PDMS and patterned by photolithography: fabrication and electromechanical characterization
Authors
Keywords
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Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 5, Pages 055025
Publisher
IOP Publishing
Online
2010-04-24
DOI
10.1088/0960-1317/20/5/055025

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