Flexible and biocompatible microelectrode arrays fabricated by supersonic cluster beam deposition on SU-8

Title
Flexible and biocompatible microelectrode arrays fabricated by supersonic cluster beam deposition on SU-8
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 21, Issue 4, Pages 045013
Publisher
IOP Publishing
Online
2011-03-11
DOI
10.1088/0960-1317/21/4/045013

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