Preparation and investigation of Al-doped ZnO thin films as a formaldehyde sensor with extremely low detection limit and considering the effect of RH
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Title
Preparation and investigation of Al-doped ZnO thin films as a formaldehyde sensor with extremely low detection limit and considering the effect of RH
Authors
Keywords
Thin film, Al doped-ZnO, Sensing performance, Formaldehyde, Relative humidity
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 121, Issue -, Pages 105283
Publisher
Elsevier BV
Online
2020-07-28
DOI
10.1016/j.mssp.2020.105283
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