On the dependence of structural and sensing properties of sputtered MoO 3 thin films on argon gas flow

Published 2014 View Full Article

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Title
On the dependence of structural and sensing properties of sputtered MoO 3 thin films on argon gas flow
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 320, Issue -, Pages 315-321
Publisher
Elsevier BV
Online
2014-09-16
DOI
10.1016/j.apsusc.2014.09.046

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