Preparation and investigation of Al-doped ZnO thin films as a formaldehyde sensor with extremely low detection limit and considering the effect of RH
出版年份 2020 全文链接
标题
Preparation and investigation of Al-doped ZnO thin films as a formaldehyde sensor with extremely low detection limit and considering the effect of RH
作者
关键词
Thin film, Al doped-ZnO, Sensing performance, Formaldehyde, Relative humidity
出版物
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 121, Issue -, Pages 105283
出版商
Elsevier BV
发表日期
2020-07-28
DOI
10.1016/j.mssp.2020.105283
参考文献
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