Low peak power deposition regime in HiPIMS: Deposition of hard and dense nanocomposite Ti-Si-N films by DOMS without the need of energetic bombardment

Published 2020 View Full Article

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Title
Low peak power deposition regime in HiPIMS: Deposition of hard and dense nanocomposite Ti-Si-N films by DOMS without the need of energetic bombardment
Authors
Keywords
TiSiN nanocomposite films, HiPIMS, DOMS, TEM, Structure
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 397, Issue -, Pages 125996
Publisher
Elsevier BV
Online
2020-06-03
DOI
10.1016/j.surfcoat.2020.125996

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