Anisotropic Etching of Pyramidal Silica Reliefs with Metal Masks and Hydrofluoric Acid

标题
Anisotropic Etching of Pyramidal Silica Reliefs with Metal Masks and Hydrofluoric Acid
作者
关键词
-
出版物
Small
Volume -, Issue -, Pages 2002290
出版商
Wiley
发表日期
2020-10-05
DOI
10.1002/smll.202002290

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