Improved Electrical Properties of Top-Gate MoS2 Transistor With NH3-Plasma Treated HfO2 as Gate Dielectric

Title
Improved Electrical Properties of Top-Gate MoS2 Transistor With NH3-Plasma Treated HfO2 as Gate Dielectric
Authors
Keywords
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Journal
IEEE ELECTRON DEVICE LETTERS
Volume 41, Issue 9, Pages 1364-1367
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2020-07-31
DOI
10.1109/led.2020.3013069

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