Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer
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Title
Low Temperature Adhesive Bonding-Based Fabrication of an Air-Borne Flexible Piezoelectric Micromachined Ultrasonic Transducer
Authors
Keywords
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Journal
SENSORS
Volume 20, Issue 11, Pages 3333
Publisher
MDPI AG
Online
2020-06-15
DOI
10.3390/s20113333
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