Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films
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Title
Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films
Authors
Keywords
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Journal
Frontiers in Physics
Volume 8, Issue -, Pages -
Publisher
Frontiers Media SA
Online
2020-05-05
DOI
10.3389/fphy.2020.00115
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