Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films

Title
Measurement and ab initio Investigation of Structural, Electronic, Optical, and Mechanical Properties of Sputtered Aluminum Nitride Thin Films
Authors
Keywords
-
Journal
Frontiers in Physics
Volume 8, Issue -, Pages -
Publisher
Frontiers Media SA
Online
2020-05-05
DOI
10.3389/fphy.2020.00115

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