Correlating structural and mechanical properties of AlN/TiN superlattice films

Published 2019 View Full Article

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Title
Correlating structural and mechanical properties of AlN/TiN superlattice films
Authors
Keywords
Superlattice, Ab initio, TEM, Elasticity, cleavage
Journal
SCRIPTA MATERIALIA
Volume 165, Issue -, Pages 159-163
Publisher
Elsevier BV
Online
2019-03-02
DOI
10.1016/j.scriptamat.2019.02.021

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