Deep learning-based detection, classification, and localization of defects in semiconductor processes

Published 2020 View Full Article

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Title
Deep learning-based detection, classification, and localization of defects in semiconductor processes
Authors
Keywords
-
Journal
Journal of Micro-Nanolithography MEMS and MOEMS
Volume 19, Issue 02, Pages 1
Publisher
SPIE-Intl Soc Optical Eng
Online
2020-04-20
DOI
10.1117/1.jmm.19.2.024801

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