Deep learning-based detection, classification, and localization of defects in semiconductor processes

出版年份 2020 全文链接

标题

Deep learning-based detection, classification, and localization of defects in semiconductor processes

作者

关键词

-

出版物

Journal of Micro-Nanolithography MEMS and MOEMS

Volume 19, Issue 02, Pages 1

出版商

SPIE-Intl Soc Optical Eng

发表日期

2020-04-20

DOI

10.1117/1.jmm.19.2.024801

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