Simple and Efficient AlN-Based Piezoelectric Energy Harvesters

MEMS vibrational energy harvesters

(2019) Hiroshi Toshiyoshi et al.   SCIENCE AND TECHNOLOGY OF ADVANCED MATERIALS

Nonlinear Multi-Mode Wideband Piezoelectric MEMS Vibration Energy Harvester

(2019) Seyedfakhreddin Nabavi et al.   IEEE SENSORS JOURNAL

A micro-electromechanical systems based vibration energy harvester with aluminum nitride piezoelectric thin film deposited by pulsed direct-current magnetron sputtering

(2018) Xianming He et al.   APPLIED ENERGY

A low-frequency MEMS piezoelectric energy harvester with a rectangular hole based on bulk PZT film

(2018) Yingwei Tian et al.   JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS

AlN piezoelectric thin films for energy harvesting and acoustic devices

(2018) Chunlong Fei et al.   Nano Energy

A Review of MEMS Scale Piezoelectric Energy Harvester

(2018) Wenchao Tian et al.   Applied Sciences-Basel

Preparation of high-quality stress-free (001) aluminum nitride thin film using a dual Kaufman ion-beam source setup

(2018) Imrich Gablech et al.   THIN SOLID FILMS

A comprehensive review on piezoelectric energy harvesting technology: Materials, mechanisms, and applications

(2018) Huicong Liu et al.   Applied Physics Reviews

Piezoelectric MEMS vibrational energy harvesters: Advances and outlook

(2017) Maria Teresa Todaro et al.   MICROELECTRONIC ENGINEERING

Stress-free deposition of [001] preferentially oriented titanium thin film by Kaufman ion-beam source

(2017) Imrich Gablech et al.   THIN SOLID FILMS

Efficient Piezoelectric Energy Harvesters Utilizing (001) Textured Bimorph PZT Films on Flexible Metal Foils

(2016) Hong Goo Yeo et al.   ADVANCED FUNCTIONAL MATERIALS

Power Optimization by Mass Tuning for MEMS Piezoelectric Cantilever Vibration Energy Harvesting

(2016) Yu Jia et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Handheld real-time PCR device

(2016) Christian D. Ahrberg et al.   LAB ON A CHIP

Preparation of (001) preferentially oriented titanium thin films by ion-beam sputtering deposition on thermal silicon dioxide

(2015) Imrich Gablech et al.   JOURNAL OF MATERIALS SCIENCE

MEMS Scale PVDF-TrFE-Based Piezoelectric Energy Harvesters

(2015) Alperen Toprak et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A vibration energy harvester using AlN piezoelectric cantilever array

(2015) Xingqiang Zhao et al.   MICROELECTRONIC ENGINEERING

ZnO thin film piezoelectric MEMS vibration energy harvesters with two piezoelectric elements for higher output performance

(2015) Peihong Wang et al.   REVIEW OF SCIENTIFIC INSTRUMENTS

Aluminum nitride on titanium for CMOS compatible piezoelectric transducers

(2009) Joseph C Doll et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING