A vibration energy harvester using AlN piezoelectric cantilever array

Published 2015 View Full Article

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Title
A vibration energy harvester using AlN piezoelectric cantilever array
Authors
Keywords
Piezoelectric, Vibration energy harvesting, MEMS devices, Array
Journal
MICROELECTRONIC ENGINEERING
Volume 142, Issue -, Pages 47-51
Publisher
Elsevier BV
Online
2015-08-06
DOI
10.1016/j.mee.2015.07.006

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