In situ and selective area etching of GaN by tertiarybutylchloride (TBCl)

Impact of damage-free wet etching process on fabrication of high breakdown voltage GaN p–n junction diodes

(2019) Naomi Asai et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Excellent potential of photo-electrochemical etching for fabricating high-aspect-ratio deep trenches in gallium nitride

(2018) Fumimasa Horikiri et al.   Applied Physics Express

Vertical GaN Junction Barrier Schottky Rectifiers by Selective Ion Implantation

(2017) Yuhao Zhang et al.   IEEE ELECTRON DEVICE LETTERS

Superjunction Power Devices, History, Development, and Future Prospects

(2017) Florin Udrea et al.   IEEE TRANSACTIONS ON ELECTRON DEVICES

Investigation of effects of ion energies on both plasma-induced damage and surface morphologies and optimization of high-temperature Cl2plasma etching of GaN

(2017) Zecheng Liu et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

High electron mobility recovery in AlGaN/GaN 2DEG channels regrown on etched surfaces

(2016) Silvia H Chan et al.   SEMICONDUCTOR SCIENCE AND TECHNOLOGY

Suppression of plasma-induced damage on GaN etched by a Cl2plasma at high temperatures

(2015) Zecheng Liu et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Reaction Pathways of GaN (0001) Growth from Trimethylgallium and Ammonia versus Triethylgallium and Hydrazine Using First Principle Calculations

(2015) Qi An et al.   Journal of Physical Chemistry C

Symmetric Multicycle Rapid Thermal Annealing: Enhanced Activation of Implanted Dopants in GaN

(2015) Jordan D. Greenlee et al.   ECS Journal of Solid State Science and Technology

In-situ decomposition and etching of AlN and GaN in the presence of HCl

(2013) Dirk Fahle et al.   JOURNAL OF CRYSTAL GROWTH

Understanding and controlling heteroepitaxy with the kinetic Wulff plot: A case study with GaN

(2011) Qian Sun et al.   JOURNAL OF APPLIED PHYSICS

Enhancement and Depletion Mode AlGaN/GaN CAVET With Mg-Ion-Implanted GaN as Current Blocking Layer

(2008) Srabanti Chowdhury et al.   IEEE ELECTRON DEVICE LETTERS