A simple way to investigate the temperature of film growth surface during sputtering process

Title
A simple way to investigate the temperature of film growth surface during sputtering process
Authors
Keywords
-
Journal
MODERN PHYSICS LETTERS B
Volume -, Issue -, Pages 1950359
Publisher
World Scientific Pub Co Pte Lt
Online
2019-09-23
DOI
10.1142/s0217984919503597

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