Article
Nanoscience & Nanotechnology
Muhammad Izzuddin Abd Samad, Mimiwaty Mohd Noor, Nafarizal Nayan, Ahmad Shuhaimi Abu Bakar, Marwan Mansor, Ahmad Wafi Mahmood Zuhdi, Azrul Azlan Hamzah, Rhonira Latif
Summary: The growth of highly crystalline c-plane AlN (002) requires high temperature and ultrahigh vacuum conditions, but incorporating purified nitrogen gas into the sputtering process can assist in the formation of AlN (002) at low temperature. This study successfully deposited single crystal (002) AlN thin film layer on a Mo/Si substrate using a sputtering technique with purified nitrogen gas. The presence of oxygen content within the AlN crystal affects the preferred growth of AlN (002) or AlN (100), leading to different thin film properties and piezoelectric response.
SCRIPTA MATERIALIA
(2023)
Article
Engineering, Electrical & Electronic
Ryo Harada, Naoya Iwamoto, Sang-Hyo Kweon, Toshihito Umegaki, Isaku Kanno
Summary: Researchers fabricated flexible piezoelectric energy harvesters composed of PZT thin films on stainless steel foils and tested their power generation performance under finger-bending motion. By applying finger-bending motions, they successfully turned on LEDs using the generated electric power from the stacked PEH.
SENSORS AND ACTUATORS A-PHYSICAL
(2021)
Article
Materials Science, Ceramics
ChongXiao Yuan, Chao Zhang, Shibing Xiao, Cheng Yang, Nannan Zhang, Huajun Sun
Summary: This study focuses on the preparation and modification of PZT nanofibers, fabrication of nanocomposite films, and production of tri-layer nanocomposite films. The alignment of the PZT nanofibers enhances the breakdown strength and polarization of the films. Electron traps at the interlayer interfaces extend the breakdown path and mitigate the electric field concentration effect, resulting in excellent electrical properties of the tri-layer films.
CERAMICS INTERNATIONAL
(2023)
Article
Nanoscience & Nanotechnology
A. Berenov, P. Petrov, B. Moffat, J. Phair, L. Allers, R. W. Whatmore
Summary: This study investigated the properties of Nb-doped lead zirconate titanate films and found that Nb doping affects the orientation and ferroelectric response of the films, while also increasing the internal field and pyroelectric coefficient. Nb-doped films showed an increase in photocurrent, exhibiting a complex relationship between photovoltaic and pyroelectric effects.
Article
Chemistry, Physical
Byeong Kon Kim, Kwan Sik Park, Sung Hun Key, Yong Soo Cho
Summary: Piezoelectric energy harvesters based on PZT ceramics have been extensively studied for low-power applications. This study proposes unprecedented multiple-harvester structures with record-breaking performance for nonresonant-frequency or extremely low-frequency applications. Through the combination of PZT with relaxor materials, the researchers optimized the structures and piezoelectricity, leading to exceptional energy-harvesting performance of the four-layer 0.4PZN-0.6PZT unimorph cantilever.
ADVANCED ENERGY MATERIALS
(2023)
Article
Multidisciplinary Sciences
Jun Li, Corey Carlos, Hao Zhou, Jiajie Sui, Yikai Wang, Zulmari Silva-Pedraza, Fan Yang, Yutao Dong, Ziyi Zhang, Timothy A. Hacker, Bo Liu, Yanchao Mao, Xudong Wang
Summary: In this study, a promising solution that integrates piezoelectricity, stretchability, and biocompatibility in one material system was presented, which is a critical step towards tissue-compatible biomedical devices.
NATURE COMMUNICATIONS
(2023)
Article
Chemistry, Physical
Pariasadat Musavigharavi, Andrew C. Meng, Dixiong Wang, Jeffery Zheng, Alexandre C. Foucher, Roy H. Olsson, Eric A. Stach
Summary: The local atomic structure and nanoscale chemistry of ferroelectric aluminum scandium nitride thin films were investigated using advanced transmission electron microscopy techniques. The study revealed that in ultrathin films, the Sc alloying concentration and strain distribution become more pronounced.
JOURNAL OF PHYSICAL CHEMISTRY C
(2021)
Article
Materials Science, Ceramics
Senlin Leng, Fen Ye, Shuquan Wan, Wei Shi, Guoyang Ma
Summary: In this study, high-performance piezoelectric ceramics with temperature stability were investigated. The ceramic doped with 1.0 wt% Nb2O5 exhibited superior piezoelectric properties and stable performance. This ceramic material emerges as an optimal choice for applications in piezoelectric devices.
CERAMICS INTERNATIONAL
(2023)
Article
Chemistry, Physical
Kevin Nadaud, Caroline Borderon, Raphael Renoud, Micka Bah, Stephane Ginestar, Hartmut W. Gundel
Summary: In this study, lead zirconate thin films were prepared on alumina substrates using sol-gel method, and their dielectric, piezoelectric, and electrostrictive properties were investigated. The experimental results reveal that the material exhibits different characteristics under different electric fields, including electrostrictive effect, piezoelectric effect, and significant strain caused by the antiferroelectric to ferroelectric phase transition. Furthermore, it is found that the piezoelectric effect coexists with the electrostrictive effect at low electric fields.
JOURNAL OF ALLOYS AND COMPOUNDS
(2022)
Article
Materials Science, Ceramics
You Jeong Eum, Jungho Ryu, Chang Young Koo, Jung Min Park, Jai-Yeoul Lee, Hee Young Lee
Summary: The modulation of magnetoelectric properties in (Ni0.5Zn0.5)Fe2O4/Pt/Pb(Zr0.3Ti0.7)O-3 (NZFO/Pt/PZT) thin films on a platinized Si substrate by varying thermal annealing conditions was studied, resulting in noticeable changes in ferroelectric, magnetic, and ME properties due to microstructural evolution and clamping relaxation during annealing. The room temperature ME voltage coefficient of the heterostructured thin films was enhanced with increasing annealing temperature, reaching 29 mV/cm.Oe at 650 degrees C.
CERAMICS INTERNATIONAL
(2021)
Article
Physics, Applied
Kien Nguyen, Ibrahima Gueye, Steven Leake, Gwenael Le Rhun, Patrice Gergaud, Nicolas Vaxelaire
Summary: An original methodology utilizing in situ biasing x-ray diffraction technique was proposed to study the behavior of single grains in Pb(Zr,Ti)O3 films. The fine analysis of the peaks allowed for calculation of various parameters such as the effective piezoelectric coefficient and the proportion of domain variants. The study revealed higher heterogeneity in samples with morphotropic phase boundary composition, contributing to the improvement of performance in piezo/ferroelectric polycrystalline films for different applications.
JOURNAL OF APPLIED PHYSICS
(2023)
Article
Physics, Applied
Khadija Oumghar, Nabil Chakhchaoui, Mohamed Assal, Adil Eddiai, Mounir El Achaby, Mounir Meddad, Omar Cherkaoui, M'hamed Mazroui
Summary: In this paper, piezoelectric lead titanate zirconate (PZT) and poly(vinylidene fluoride-hexafuoropropylene) (PVdF-HFP) are used to prepare piezo thin nanocomposite film. The enhancement of the ferroelectric and piezoelectric properties of PVdF-HFP was achieved by creating an improvement in the beta phase through the reaction between PZT nanoparticles and PVdF-HFP. The results confirm that incorporating PZT nanoparticles in the PVDF-HFP matrix increases the beta-phase fraction, enhancing the efficiency of energy harvesting.
EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS
(2022)
Article
Nanoscience & Nanotechnology
Hua Fan, Zhengwei Tan, Haoyang Liu, Luyong Zhang, Fengyuan Zhang, Wanshun Du, Zhen Fan, Xingsen Gao, Feng Pan, Dapeng Yu, Yue Zhao
Summary: This study reports significantly enhanced ferroelectric and piezoelectric properties of graphene/PZT/SRO capacitors, attributing the enhanced performance to improved interface quality and inhibited growth of defective interfacial layer.
ACS APPLIED MATERIALS & INTERFACES
(2022)
Article
Multidisciplinary Sciences
Fan Yang, Jun Li, Yin Long, Ziyi Zhang, Linfeng Wang, Jiajie Sui, Yutao Dong, Yizhan Wang, Rachel Taylor, Dalong Ni, Weibo Cai, Ping Wang, Timothy Hacker, Xudong Wang
Summary: The research introduces a novel approach for the large-scale fabrication of piezoelectric biomaterial thin films with excellent piezoelectric properties and mechanical flexibility. The glycine-PVA films, with their natural compatibility and degradability in physiological environments, have the potential to advance the development of transient implantable electromechanical devices.
Article
Chemistry, Physical
Feier Ni, Kun Zhu, Liuxue Xu, Guohui Li, Yang Liu, Jin Qian, Bo Shen, Huarong Zeng, Jiwei Zhai
Summary: High-performance lead-free piezoelectric films are crucial in micro-electromechanical systems (MEMS), and defects can impact their performance. In this study, the researchers controlled the balance of A-site defects by introducing rare earth La ions, which led to rapid switching of domain structures and enhanced the piezoelectric response of the thin film. The findings suggest that balancing defects can improve the piezoelectric properties of thin films.
APPLIED SURFACE SCIENCE
(2022)
Article
Chemistry, Physical
Sang Hyo Kweon, Yusuke Kamada, Takashi Harada, Shuji Nakanishi, Yoshiharu Mukouyama, Isaku Kanno
Summary: Photo-electrochemical water splitting is a promising technique for H-2 production using solar energy. By using ferroelectric materials, which possess internal electric fields, the efficiency of solar-to-hydrogen conversion can be enhanced. Experimental results showed that c-axis-oriented epitaxial-PLT thin films on platinized MgO001 exhibited a giant photopotential, enabling hydrogen evolution reaction under bias-free conditions.
ACS APPLIED ENERGY MATERIALS
(2022)
Article
Physics, Applied
Kiyotaka Tanaka, Rei Ogawa, Sang Hyo Kweon, Goon Tan, Isaku Kanno
Summary: Epitaxial KNN thin films were deposited on substrates, and the effects of post-annealing on the as-deposited films were investigated. The crystal structure changed and the polarization-electric field hysteresis loop became asymmetric after annealing. The stable spontaneous polarization direction changed and a high converse piezoelectric coefficient was obtained.
JAPANESE JOURNAL OF APPLIED PHYSICS
(2022)
Article
Physics, Applied
Goki Kimura, Sang Hyo Kweon, Kiyotaka Tanaka, Goon Tan, Tomoyuki Koganezawa, Isaku Kanno
Summary: The research revealed that PZT thin films exhibit coexistence of tetragonal and cubic structures at high temperatures, with a phase transition of crystallographic structure occurring during the cooling process. After high-temperature treatment, the thin films showed a large voltage dependence of the inverse piezoelectric coefficients.
JAPANESE JOURNAL OF APPLIED PHYSICS
(2022)
Article
Materials Science, Ceramics
Jing Yan, Hanfei Zhu, Jun Ouyang, Isaku Kanno, Peng Yan, Yingying Wang, Kouta Onishi, Takumi Nishikado
Summary: Piezoelectric BiFeO3 films were successfully prepared on stainless steel foils and exhibited enhanced ferroelectric and dielectric properties. The optimized heterostructure achieved large piezoelectric coefficients for applications in actuators and energy harvesters.
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
(2022)
Article
Physics, Applied
Eun-Ji Kim, Sang-Hyo Kweon, Sahn Nahm, Yukio Sato, Goon Tan, Isaku Kanno
Summary: This study proposes an energy harvesting device made of an epitaxial PZT thin film on a silicon substrate. The device has a large direct piezoelectric coefficient and a small relative permittivity constant, enabling high power density in piezoelectric energy harvesters. Experimental results show that the device has high output power and power density at resonant frequency and acceleration, making it suitable for high power energy harvesting applications.
APPLIED PHYSICS LETTERS
(2022)
Article
Physics, Applied
Kiyotaka Tanaka, Yoshiyuki Kawata, Sang Hyo Kweon, Goon Tan, Takeshi Yoshimura, Isaku Kanno
Summary: Epitaxial growth of lead-free (K,Na)NbO3 (KNN) thin films on (001)SrRuO3/Pt/ZrO2/Si substrates was achieved by using RF magnetron sputtering. The thin films exhibited similar lattice constants and spontaneous polarization as KNN single crystals. Moreover, the thin films had low dielectric constants and relatively high converse piezoelectric coefficients achievable at low voltages.
APPLIED PHYSICS LETTERS
(2022)
Article
Materials Science, Multidisciplinary
Goon Tan, Sang-Hyo Kweon, Isaku Kanno
Summary: In this study, the piezoelectric characteristics of sol-gel Pb(Zr0.52Ti0.48)O3 (PZT) films deposited on two different types of substrates were investigated. Epitaxial PZT films were grown on ZrO2-buffered Si substrates, while polycrystalline PZT films were grown on conventional Pt/Ti/Si substrates by the sol-gel method. The epitaxial PZT films exhibited good piezoelectric properties with more stable voltage dependence compared to the polycrystalline sol-gel PZT films.
Editorial Material
Physics, Applied
Isaku Kanno, Jun Ouyang, Jun Akedo, Takeshi Yoshimura, Barbara Malic, Paul Muralt
APPLIED PHYSICS LETTERS
(2023)
Article
Physics, Applied
Goki Kimura, Sang-Hyo Kweon, Kiyotaka Tanaka, Yukio Sato, Isaku Kanno
Summary: Artificial superlattice thin films of PZT were grown on silicon substrates, and the influence of strain on their piezoelectric properties was studied. Different PZT layers with a 4nm period were observed. The ferroelectric properties varied depending on the composition, and the strain between layers controlled the piezoelectric properties.
APPLIED PHYSICS LETTERS
(2023)
Article
Physics, Applied
V. Priyadarsini, Athul Pradeep, P. J. Jumana, Isaku Kanno, V. Kumar
Summary: This study explores the effect of B-site Mn3+ doping on the structure of quaternary system PbTiO3-PbZrO3-SrTiO3-SrZrO3. The efficacy of this approach has been understood by comparing the dielectric, ferroelectric, and piezoelectric characteristics of Mn3+-doped thin films with those with increasing Zr/Ti ratios. The results show that Mn3+-doped thin films exhibit higher transverse piezoelectric coefficient e(31,f) and bipolar strain. Furthermore, the large strains and e(31,f) in thin films have been correlated with structural modifications revealed by systematic Raman spectroscopic investigations.
JOURNAL OF APPLIED PHYSICS
(2023)
Article
Engineering, Electrical & Electronic
Patrick Bach, Sang-Hyo Kweon, Hirotaka Hida, Isaku Kanno
Summary: In this paper, a piezoelectric haptic actuator based on PZT thin-film was presented. The actuator achieved a large displacement over 10 μm at a resonance frequency between 10 and 500 Hz. The actuator was fabricated using German silver foils as a substrate and the PZT thin film was deposited using RF-magnetron sputtering. The actuator's vibrational displacements were evaluated and its practical usage was demonstrated through haptic feedback tests.
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
(2023)
Article
Chemistry, Physical
Youcao Ma, Jian Song, Yuyao Zhao, Kiyotaka Tanaka, Shijunbo Wu, Chao Dong, Xubo Wang, Isaku Kanno, Jun Ouyang, Jia Zhou, Yue Liu
Summary: Perovskite PZT films with similar epitaxial multilayered structure and crystallographic orientation were successfully prepared on 3-inch silicon wafers using rapid thermal annealing (RTA) process. These films exhibited (001) crystallographic orientation at certain composition with morphotropic phase boundary. The dielectric, ferroelectric, and piezoelectric properties fluctuated within 5% on different positions. The uniformity and properties of these films met the requirement for the design and fabrication of piezo-MEMS devices, broadening the design and fabrication criteria for piezo-MEMS, especially for piezoelectric micromachined ultrasonic transducers.
Article
Engineering, Electrical & Electronic
Shunsuke Akasaka, Isaku Kanno
Summary: In this study, we developed a limiting current-type oxygen microsensor that is capable of sensing a wide range of oxygen concentrations. By utilizing specific materials and controlling the temperature, we achieved a linear relationship between oxygen concentration and limiting current within a certain temperature range.
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING
(2023)
Article
Materials Science, Multidisciplinary
Athul Pradeep, V Priyadarsini, V Kumar, Takumi Nishikado, Yuichi Kanayama, Isaku Kanno
Summary: This paper reports the fabrication of highly transparent PZT thin films on ITO-coated glass substrate and measures their transverse piezoelectric coefficient, dielectric permittivity, and dielectric loss. The results show that the PZT/ITO/glass heterostructure has good optical transparency and piezoelectric performance, making it suitable for transparent piezoelectric thin film devices.
BULLETIN OF MATERIALS SCIENCE
(2023)
Proceedings Paper
Engineering, Electrical & Electronic
Shunsuke Akasaka, Isaku Kanno
Summary: In this study, a limiting current-type MEMS sensor was fabricated and its sensing performance for measuring oxygen and humidity concentration was evaluated. The results showed that the limiting current increased proportionally with oxygen concentration, while it increased with humidity at higher bias voltage.
