Identification of colloidal silica polishing induced contamination in silicon

Published 2019 View Full Article

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Title
Identification of colloidal silica polishing induced contamination in silicon
Authors
Keywords
Silicon, Polishing, Contamination, Atom probe tomography, Correlative microscopy
Journal
MATERIALS CHARACTERIZATION
Volume 152, Issue -, Pages 239-244
Publisher
Elsevier BV
Online
2019-04-24
DOI
10.1016/j.matchar.2019.04.029

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