Identification of colloidal silica polishing induced contamination in silicon

出版年份 2019 全文链接

标题

作者

关键词

Silicon, Polishing, Contamination, Atom probe tomography, Correlative microscopy

出版物

MATERIALS CHARACTERIZATION

Volume 152, Issue -, Pages 239-244

出版商

Elsevier BV

发表日期

2019-04-24

DOI

10.1016/j.matchar.2019.04.029

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