Reaction kinetics and growth window for plasma-assisted molecular beam epitaxy of Ga2O3: Incorporation of Ga vs. Ga2O desorption
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Title
Reaction kinetics and growth window for plasma-assisted molecular beam epitaxy of Ga2O3: Incorporation of Ga vs. Ga2O desorption
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 108, Issue 7, Pages 072101
Publisher
AIP Publishing
Online
2016-02-18
DOI
10.1063/1.4942002
References
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