Lead-free Mn-doped (K0.5,Na0.5)NbO3 piezoelectric thin films for MEMS-based vibrational energy harvester applications
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Title
Lead-free Mn-doped (K0.5,Na0.5)NbO3 piezoelectric thin films for MEMS-based vibrational energy harvester applications
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 108, Issue 23, Pages 232908
Publisher
AIP Publishing
Online
2016-06-09
DOI
10.1063/1.4953623
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Note: Only part of the references are listed.- Improved electrical properties for Mn-doped lead-free piezoelectric potassium sodium niobate ceramics
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- Vibration energy harvesting with aluminum nitride-based piezoelectric devices
- (2009) R Elfrink et al. JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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- (2008) M. Abazari et al. APPLIED PHYSICS LETTERS
- A biocompatible Parylene thermal flow sensing array
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