Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting

Published 2009 View Full Article

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Title
Micromachined PZT cantilever based on SOI structure for low frequency vibration energy harvesting
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 154, Issue 1, Pages 103-108
Publisher
Elsevier BV
Online
2009-06-25
DOI
10.1016/j.sna.2009.06.007

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