Fully ALD-grown TiN/Hf0.5Zr0.5O2/TiN stacks: Ferroelectric and structural properties

Title
Fully ALD-grown TiN/Hf0.5Zr0.5O2/TiN stacks: Ferroelectric and structural properties
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 109, Issue 19, Pages 192903
Publisher
AIP Publishing
Online
2016-11-09
DOI
10.1063/1.4966219

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