High-k dielectrics for future generation memory devices (Invited Paper)

Published 2009 View Full Article

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Title
High-k dielectrics for future generation memory devices (Invited Paper)
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 7-9, Pages 1789-1795
Publisher
Elsevier BV
Online
2009-03-14
DOI
10.1016/j.mee.2009.03.045

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