Structural and electrical characteristics of high-k/metal gate metal oxide semiconductor capacitors fabricated on flexible, semi-transparent silicon (100) fabric

Title
Structural and electrical characteristics of high-k/metal gate metal oxide semiconductor capacitors fabricated on flexible, semi-transparent silicon (100) fabric
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 102, Issue 6, Pages 064102
Publisher
AIP Publishing
Online
2013-02-13
DOI
10.1063/1.4791693

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