Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

A Comprehensive High-Level Model for CMOS-MEMS Resonators

(2018) Saoni Banerji et al.   IEEE SENSORS JOURNAL

Effect of mode order, resonator length, curvature, and electrode coverage on enhancing the performance of biconvex resonators

(2018) Muhammad Wajih Ullah Siddiqi et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Evanescent Bloch waves and complex band structure in magnetoelectroelastic phononic crystals

(2018) E.J.P. Miranda et al.   MECHANICAL SYSTEMS AND SIGNAL PROCESSING

Numerical modeling of existing acoustic emission sensor absolute calibration approaches

(2018) Markus G.R. Sause et al.   SENSORS AND ACTUATORS A-PHYSICAL

Low-Cost Microfabrication for MEMS Switches and Varactors

(2018) Isibor E. Obuh et al.   IEEE Transactions on Components Packaging and Manufacturing Technology

Investigation on the Quality Factor Limit of the (111) Silicon Based Disk Resonator

(2018) Xin Zhou et al.   Micromachines

Optimization of Pulley-Type Ring Resonator with Waveguide Offset

(2018) Meng-Hua Yen et al.   Micromachines

Wide Acoustic Bandgap Solid Disk-Shaped Phononic Crystal Anchoring Boundaries for Enhancing Quality Factor in AlN-on-Si MEMS Resonators

(2018) Muhammad Siddiqi et al.   Micromachines

High- ${Q}$ Butterfly-Shaped AlN Lamb Wave Resonators

(2017) Jie Zou et al.   IEEE ELECTRON DEVICE LETTERS

Piezoelectric-on-Silicon Array Resonators With Asymmetric Phononic Crystal Tethering

(2017) Udit Rawat et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Surface-enhanced gallium arsenide photonic resonator with quality factor of 6 × 10^6

(2017) Biswarup Guha et al.   Optica

GHz spurious mode free AlN lamb wave resonator with high figure of merit using one dimensional phononic crystal tethers

(2016) Guoqiang Wu et al.   APPLIED PHYSICS LETTERS

Structural engineering of three-dimensional phononic crystals

(2016) Tommaso Delpero et al.   JOURNAL OF SOUND AND VIBRATION

Investigation of complete bandgaps in a piezoelectric slab covered with periodically structured coatings

(2016) Kui Zou et al.   ULTRASONICS

A phononic crystal strip based on silicon for support tether applications in silicon-based MEMS resonators and effects of temperature and dopant on its band gap characteristics

(2016) Thi Dep Ha et al.   AIP Advances

Reducing anchor loss In thin-film aluminum nitride-on-diamond contour mode MEMS resonators with support tethers based on phononic crystal strip and reflector

(2015) Thi Dep Ha et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Experimental evidence of high-frequency complete elastic bandgap in pillar-based phononic slabs

(2014) Reza Pourabolghasem et al.   APPLIED PHYSICS LETTERS

Phononic crystal strip based anchors for reducing anchor loss of micromechanical resonators

(2014) Duan Feng et al.   JOURNAL OF APPLIED PHYSICS

In-Plane Vibration Analysis of Annular Plates with Arbitrary Boundary Conditions

(2014) Xianjie Shi et al.   TheScientificWorldJOURNAL

Hybrid phononic crystal plates for lowering and widening acoustic band gaps

(2014) M. Badreddine Assouar et al.   ULTRASONICS

Optimisation Design of Coupling Region Based on SOI Micro-Ring Resonator

(2014) Shubin Yan et al.   Micromachines

Finite-element based perturbation analysis of wave propagation in nonlinear periodic structures

(2012) Kevin Manktelow et al.   MECHANICAL SYSTEMS AND SIGNAL PROCESSING

Analysis of anchor and interface losses in piezoelectric MEMS resonators

(2012) A. Frangi et al.   SENSORS AND ACTUATORS A-PHYSICAL

Nonlinear Modeling for Distortion Analysis in Silicon Bulk-Mode Ring Resonators

(2012) Abolfazl Bijari et al.   Micromachines

Observation of band gaps in the gigahertz range and deaf bands in a hypersonic aluminum nitride phononic crystal slab

(2011) M. Gorisse et al.   APPLIED PHYSICS LETTERS

Design of lossless anchors for microacoustic-wave resonators utilizing phononic crystal strips

(2011) Feng-Chia Hsu et al.   APPLIED PHYSICS LETTERS

What is the Young's Modulus of Silicon?

(2010) Matthew A. Hopcroft et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

In-plane free vibration of circular annular disks

(2009) S. Bashmal et al.   JOURNAL OF SOUND AND VIBRATION