Phononic crystal strip based anchors for reducing anchor loss of micromechanical resonators
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Title
Phononic crystal strip based anchors for reducing anchor loss of micromechanical resonators
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 115, Issue 2, Pages 024503
Publisher
AIP Publishing
Online
2014-01-15
DOI
10.1063/1.4861409
References
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