Theoretical realization of three-dimensional nanolattice structure fabrication based on high-order waveguide-mode interference and sample rotation
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Title
Theoretical realization of three-dimensional nanolattice structure fabrication based on high-order waveguide-mode interference and sample rotation
Authors
Keywords
Nanolithography, Subwavelength structure, Waveguide mode, Sample rotation
Journal
OPTICAL AND QUANTUM ELECTRONICS
Volume 51, Issue 2, Pages -
Publisher
Springer Nature
Online
2019-01-25
DOI
10.1007/s11082-019-1759-2
References
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