Theoretical study of multiexposure zeroth-order waveguide mode interference lithography

Title
Theoretical study of multiexposure zeroth-order waveguide mode interference lithography
Authors
Keywords
Nanolithography, Subwavelength structure, Waveguide mode, Sample rotation
Journal
OPTICAL AND QUANTUM ELECTRONICS
Volume 50, Issue 9, Pages -
Publisher
Springer Nature America, Inc
Online
2018-08-19
DOI
10.1007/s11082-018-1601-2

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