Theoretical study of multiexposure zeroth-order waveguide mode interference lithography
Published 2018 View Full Article
- Home
- Publications
- Publication Search
- Publication Details
Title
Theoretical study of multiexposure zeroth-order waveguide mode interference lithography
Authors
Keywords
Nanolithography, Subwavelength structure, Waveguide mode, Sample rotation
Journal
OPTICAL AND QUANTUM ELECTRONICS
Volume 50, Issue 9, Pages -
Publisher
Springer Nature America, Inc
Online
2018-08-19
DOI
10.1007/s11082-018-1601-2
References
Ask authors/readers for more resources
Related references
Note: Only part of the references are listed.- Inscription of sub-wavelength gratings with different periods based on asymmetric metal-cladding dielectric waveguide structure
- (2017) Xiangxian Wang et al. OPTIK
- Single-mode-resonance interference in photoresist sub-micron waveguide for high exposure depth nanolithography
- (2016) Zheng Yang et al. MICROELECTRONIC ENGINEERING
- Surface plasmon-assisted nano-lithography with a perfect contact aluminum mask of a hexagonal dot array
- (2016) Eun Sung Kim et al. Plasmonics
- Ultrastructural Characterization of the Lower Motor System in a Mouse Model of Krabbe Disease
- (2016) Valentina Cappello et al. Scientific Reports
- Multiexposure laser interference lithography
- (2015) Abdollah Hassanzadeh et al. Journal of Nanophotonics
- Waveguide-mode interference lithography technique for high contrast subwavelength structures in the visible region
- (2014) Kanta Kusaka et al. OPTICS EXPRESS
- Large area sub-wavelength azo-polymer gratings by waveguide modes interference lithography
- (2013) Xiangxian Wang et al. APPLIED PHYSICS LETTERS
- Subwavelength lithography by waveguide mode interference
- (2011) Bing Wang et al. APPLIED PHYSICS LETTERS
- A practical nanofabrication method: surface plasmon polaritons interference lithography based on backside-exposure technique
- (2010) Mingyang He et al. OPTICS EXPRESS
- E-Beam Patterned Gold Nanodot Arrays on Optical Fiber Tips for Localized Surface Plasmon Resonance Biochemical Sensing
- (2010) Yongbin Lin et al. SENSORS
- Excitation of gap modes in a metal particle-surface system for sub-30 nm plasmonic lithography
- (2009) Vadakke Matham Murukeshan et al. OPTICS LETTERS
- Fast-scale border collision bifurcation in SEPIC power factor pre-regulators
- (2008) Liu Fang Chinese Physics B
- A large-area photolithography technique based on surface plasmons leakage modes
- (2008) Guanghui Yuan et al. OPTICS COMMUNICATIONS
- Nanofabrication with controllable localization energy based on the interference modulation of surface plasmons
- (2008) Xingzhan Wei et al. OPTICS EXPRESS
- Sub-diffraction-limited interference photolithography with metamaterials
- (2008) Ting Xu et al. OPTICS EXPRESS
Add your recorded webinar
Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.
Upload NowBecome a Peeref-certified reviewer
The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.
Get Started