High-temperature annealing induced evolution of strain in AlN epitaxial films grown on sapphire substrates
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Title
High-temperature annealing induced evolution of strain in AlN epitaxial films grown on sapphire substrates
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 114, Issue 11, Pages 112105
Publisher
AIP Publishing
Online
2019-03-19
DOI
10.1063/1.5087547
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- (2008) R. Jain et al. APPLIED PHYSICS LETTERS
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