High-temperature annealing induced evolution of strain in AlN epitaxial films grown on sapphire substrates

Title
High-temperature annealing induced evolution of strain in AlN epitaxial films grown on sapphire substrates
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 114, Issue 11, Pages 112105
Publisher
AIP Publishing
Online
2019-03-19
DOI
10.1063/1.5087547

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