Epitaxial growth of AlN films on sapphire via a multilayer structure adopting a low- and high-temperature alternation technique

Crack-Free Thick AlN Films Obtained by NH3Nitridation of Sapphire Substrates

(2013) Ryan G. Banal et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

AlN heteroepitaxy on sapphire by metalorganic vapour phase epitaxy using low temperature nucleation layers

(2013) Haoning Li et al.   JOURNAL OF CRYSTAL GROWTH

Influence of the growth temperature of AlN nucleation layer on AlN template grown by high-temperature MOCVD

(2013) Yiren Chen et al.   MATERIALS LETTERS

High quality AlN grown on double layer AlN buffers on SiC substrate for deep ultraviolet photodetectors

(2012) T. M. Al tahtamouni et al.   APPLIED PHYSICS LETTERS

Density functional theoretical study of surface structure and adatom kinetics for wurtzite AlN

(2009) Vibhu Jindal et al.   JOURNAL OF APPLIED PHYSICS

High quality AlN grown on SiC by metal organic chemical vapor deposition

(2008) Z. Chen et al.   APPLIED PHYSICS LETTERS

Impact of high-temperature growth by metal-organic vapor phase epitaxy on microstructure of AlN on 6H-SiC substrates

(2007) Masataka Imura et al.   JOURNAL OF CRYSTAL GROWTH