Electron-beam radiation induced degradation of silicon nitride and its impact to semiconductor failure analysis by TEM

Published 2018 View Full Article

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Title
Electron-beam radiation induced degradation of silicon nitride and its impact to semiconductor failure analysis by TEM
Authors
Keywords
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Journal
AIP Advances
Volume 8, Issue 11, Pages 115327
Publisher
AIP Publishing
Online
2018-11-29
DOI
10.1063/1.5051813
References
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