Electron-beam radiation induced degradation of silicon nitride and its impact to semiconductor failure analysis by TEM

标题
Electron-beam radiation induced degradation of silicon nitride and its impact to semiconductor failure analysis by TEM
作者
关键词
-
出版物
AIP Advances
Volume 8, Issue 11, Pages 115327
出版商
AIP Publishing
发表日期
2018-11-29
DOI
10.1063/1.5051813

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