Enhanced capacitive property of HfN film electrode by plasma etching for supercapacitors

Published 2018 View Full Article

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Title
Enhanced capacitive property of HfN film electrode by plasma etching for supercapacitors
Authors
Keywords
HfN thin films, Physical vapour deposition, Plasma etching, Supercapacitor, Electrochemical properties
Journal
MATERIALS LETTERS
Volume 235, Issue -, Pages 148-152
Publisher
Elsevier BV
Online
2018-10-08
DOI
10.1016/j.matlet.2018.10.032

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