Piezoresistance in Si3N4 nanobelts: toward highly sensitive and reliable pressure sensors
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Title
Piezoresistance in Si3N4 nanobelts: toward highly sensitive and reliable pressure sensors
Authors
Keywords
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Journal
Journal of Materials Chemistry C
Volume 2, Issue 47, Pages 10062-10066
Publisher
Royal Society of Chemistry (RSC)
Online
2014-09-24
DOI
10.1039/c4tc01810a
References
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